机械研磨单晶金刚石刀具前刀面精度

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基金项目:

吉林省重点科技研发项目(20180201030GX)。

Precision of rake face of mechanically lapped single crystal diamond tool

School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China

摘要: 为提高金刚石刀具的精度，理论分析机械研磨法加工金刚石前刀面的模型，并实验研究研磨盘表面质量和研磨晶向对金刚石刀具前刀面粗糙度的影响。结果表明：研磨盘经过充分平整后，刀具前刀面的粗糙度R_a由1.308 nm下降到0.920 nm。在(110)晶面精细研磨时，<100>晶向研磨后的表面粗糙度为0.540 nm，<110>晶向研磨后的表面粗糙度为0.430 nm，实现了对金刚石刀具的精密研磨。
- 金刚石刀具 /
- 机械研磨 /
- 研磨盘 /
- 晶向 /
- 表面粗糙度
Abstract: In order to improve the precision of diamond tool, the model of mechanical lapping diamond rake surface is analyzed, and experiments are implemented to study the influence of scaife pre-lapping quality and lapping crystal direction on the rake surface precision of diamond tool. After fully pre-lapping the scaife, the roughnessR_aof the diamond tool rake surface decreases from 1.308 nm to 0.920 nm. In the fine lapping of (110) crystal surface, the surface roughness of <100> crystal orientation after lapping is 0.540 nm and the surface roughness along <110> crystal orientation is 0.430 nm, realizing the precision lapping of diamond tools.
- diamond tool /
- mechanical grinding /
- scaife /
- crystal orientation /
- surface roughness