研磨盘运动特性对氮化硅陶瓷球成形影响性分析

葛自强; 李颂华; 吴玉厚; 孙健; 田军兴; 夏忠贤

doi:10.13394/j.cnki.jgszz.2023.0012

研磨盘运动特性对氮化硅陶瓷球成形影响性分析

doi: 10.13394/j.cnki.jgszz.2023.0012

葛自强¹,
李颂华^{1, 2},
吴玉厚^{1, 2},
孙健¹,
田军兴¹,
夏忠贤¹

1.
沈阳建筑大学机械工程学院，沈阳 110168
2.
沈阳建筑大学，高档石材数控加工装备与技术国家地方联合工程实验室，沈阳 110168

详细信息

中图分类号: TG58; TG74
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出版历程
- 收稿日期: 2023-01-29
- 修回日期: 2023-04-08
- 录用日期: 2023-04-10
- 网络出版日期: 2023-11-06
- 刊出日期: 2023-12-01

Study on the influence of grinding disc motion on the forming of silicon nitride ceramic balls

1.
School of Mechanical Engineering, Shenyang Jianzhu University, Shenyang 110168, China
2.
National-Local Joint Engineering Laboratory of NC Machining Equipment and Technology of High-Grade Stone, Shenyang 110168, China

摘要

摘要: 为提高氮化硅陶瓷球加工精度，提出研磨盘偏摆运动可控的新型锥形柔性支承研磨方式，探究柔性支承研磨方式下陶瓷球成形机理。基于新型研磨方式建立仿真模型，深入分析研磨盘偏摆运动对于氮化硅陶瓷球研磨轨迹与受力状态影响。在搭建的新型锥形柔性支承研磨平台上进行正交实验，进一步分析研磨盘运动特性对球体成形的影响。仿真与实验结果表明：在柔性支承研磨方式下，随着研磨盘偏摆角增大，球体轨迹均匀性标准差从43.58降至35.49，最大接触力提升至初始值的4倍，陶瓷球平均球直径变动量从1.466 μm增至2.382 μm，批直径变动量从4.98 μm增至10.27 μm。研磨盘偏摆运动有利于优化研磨轨迹，但增大了球体受力的不均匀性，不利于改善氮化硅陶瓷球平均球直径变动量与批直径变动量，在实际加工过程中，研磨盘偏摆角需控制在0.02°以内。
- 氮化硅陶瓷球 /
- 柔性支承研磨 /
- 研磨盘偏摆 /
- 球直径变动量 /
- 批直径变动量
Abstract: In order to improve the processing accuracy of silicon nitride ceramic balls and to investigate the mechanism of forming ceramic balls by flexible support grinding method, a new cone-type flexible support grinding method with controlled deflection motion of grinding disc is proposed. Based on the new grinding method, a simulation model is established to deeply analyze the influence of the deflection motion of the grinding disc on the grinding trajectory and force state of the silicon nitride ceramic balls. Orthogonal experiments were conducted on a new cone-type flexible support grinding platform built to further analyze the effect of grinding disc motion characteristics on ball formation. Simulation and experimental results show that under the flexible support grinding method, As the increases of grinding disc deflection angle, the standard deviation of ball trajectory uniformity decreased from 43.58 to 35.49, the maximum contact force increased to 4 times the initial value, the average ball diameter variation increased from 1.466 μm to 2.382 μm, and the batch diameter variation increased from 4.98 μm to 10.27 μm. The lower grinding disc deflection motion is beneficial to optimize the grinding trajectory, but increases the unevenness of the ball force, which is not conducive to improving the average ball diameter variation and batch diameter variation of silicon nitride ceramic balls. In the actual process, the angle of deflection of the grinding disc must be controlled to within 0.02°.
- silicon nitride ceramic balls /
- flexible support grinding /
- grinding disc deflection /
- ball diameter variation /
- batch diameter variation

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图 1 非磁流体支承装置示意图

Figure 1. Schematic diagram of non-magnetic fluid support device

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图 2 新型研磨装置示意图

Figure 2. Schematic diagram of the new grinding device

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图 3 新型研磨装置仿真模型

Figure 3. Simulation model of the new grinding device

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图 4 陶瓷球与研磨盘接触示意图

Figure 4. Schematic diagram of the contact between ceramic ball and grinding disc

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图 5 陶瓷球自转角速度

Figure 5. Angular velocity of ceramic ball rotation

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图 6 陶瓷球自转角速度稳定性分析图

Figure 6. Analysis of the stability of the angular velocity of the ceramic ball rotation

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图 7 陶瓷球自转角变化示意图

Figure 7. Schematic diagram of the change in rotation angle of the ceramic ball

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图 8 陶瓷球轨迹线与微观表面对比图

Figure 8. Ceramic ball trajectory line versus microscopic surface

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图 9 陶瓷球研磨轨迹与轨迹点统计

Figure 9. Ceramic ball grinding trajectory and trajectory point statistics

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图 10 不同偏摆角下研磨轨迹点分布标准差

Figure 10. Standard deviation of grinding track point distribution at different deflection angles

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图 11 接触力变化趋势图

Figure 11. Trend of contact force

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图 12 新型研磨装置实验平台

Figure 12. Test platform for new grinding device

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图 13 研磨前后的陶瓷球对比图

Figure 13. Comparison of ceramic balls before and after grinding

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图 14 研磨盘偏摆对平均球直径变动量与批直径变动量影响

Figure 14. Effect of grinding disc deflection on the amount of average ball diameter variation and batch diameter variation

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图 15 研磨盘转速对平均球直径变动量与批直径变动量影响

Figure 15. Effect of grinding disc speed on the amount of average ball diameter variation and batch diameter variation

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图 16 研磨压力对平均球直径变动量与批直径变动量影响

Figure 16. Effect of grinding pressure on the amount of average ball diameter variation and batch diameter variation

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图 17 研磨液浓度对平均球直径变动量与批直径变动量影响

Figure 17. Effect of abrasive concentration on the amount of average ball diameter variation and batch diameter variation

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表 1 氮化硅陶瓷球物理性能

Table 1. Physical properties of silicon nitride ceramic ball

参数参数值

密度 ρ / (g∙cm⁻³) 3.26
弹性模量 E / GPa 310
硬度 H / GPa 16
泊松比 ε 0.25
断裂韧性 K_IC / (MPa∙m⁻²) 7.0
热膨胀系数 λ / K⁻¹ 3.2 × 10⁻⁶

下载: 导出CSV

表 2 正交实验因素水平表

Table 2. Table of orthogonal experimental factor levels

水平因素
下盘偏摆角
θ / (°)
A 研磨盘转速
n / (r·min⁻¹)
B 压力
F / N
C 质量浓度
c / %
D

1 0.02 80 10 5
2 0.11 120 20 10
3 0.44 160 30 15

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表 3 平均球直径变动量正交回应表

Table 3. Orthogonal response table for mean average ball diameter variation

水平因素
下盘偏
摆角A 转速
B 压力
C 研磨液质量
浓度D

1 1.466 2.402 2.181 2.065
2 2.304 1.976 2.049 2.013
3 2.382 1.774 1.921 2.074
极差 0.916 0.628 0.260 0.061

下载: 导出CSV

表 4 批直径变动量正交回应表

Table 4. Orthogonal response table for batch diameter variation

水平因素
下盘偏
摆角A 转速
B 压力
C 研磨液
浓度D

1 4.98 9.78 6.73 8.83
2 10.88 9.67 9.90 8.58
3 10.27 6.68 9.53 8.72
极差 5.90 3.10 3.17 0.25

下载: 导出CSV

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研磨盘运动特性对氮化硅陶瓷球成形影响性分析

doi: 10.13394/j.cnki.jgszz.2023.0012

计量

Study on the influence of grinding disc motion on the forming of silicon nitride ceramic balls

计量

目录

参数	参数值
密度 ρ / (g∙cm⁻³)	3.26
弹性模量 E / GPa	310
硬度 H / GPa	16
泊松比 ε	0.25
断裂韧性 K_IC / (MPa∙m⁻²)	7.0
热膨胀系数 λ / K⁻¹	3.2 × 10⁻⁶

水平	因素
水平	下盘偏摆角 θ / (°) A	研磨盘转速 n / (r·min⁻¹) B	压力 F / N C	质量浓度 c / % D
1	0.02	80	10	5
2	0.11	120	20	10
3	0.44	160	30	15

水平	因素
水平	下盘偏摆角A	转速 B	压力 C	研磨液质量浓度D
1	1.466	2.402	2.181	2.065
2	2.304	1.976	2.049	2.013
3	2.382	1.774	1.921	2.074
极差	0.916	0.628	0.260	0.061

水平	因素
水平	下盘偏摆角A	转速 B	压力 C	研磨液浓度D
1	4.98	9.78	6.73	8.83
2	10.88	9.67	9.90	8.58
3	10.27	6.68	9.53	8.72
极差	5.90	3.10	3.17	0.25

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研磨盘运动特性对氮化硅陶瓷球成形影响性分析

doi: 10.13394/j.cnki.jgszz.2023.0012

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出版历程

Study on the influence of grinding disc motion on the forming of silicon nitride ceramic balls

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