Wear properties of HFCVD diamond films on SiC substrate

WANG He; SHEN Jianhui; LIU Lusheng; YAN Guangyu; WU Yuhou; XIONG Jiaji; DANIEL Cristea

doi:10.13394/j.cnki.jgszz.2021.0206

Volume 42 Issue 3

Jul. 2022

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Article Navigation > Diamond & Abrasives Engineering > 2022 > 42(3): 283-289

WANG He, SHEN Jianhui, LIU Lusheng, YAN Guangyu, WU Yuhou, XIONG Jiaji, DANIEL Cristea. Wear properties of HFCVD diamond films on SiC substrate[J]. Diamond & Abrasives Engineering, 2022, 42(3): 283-289. doi: 10.13394/j.cnki.jgszz.2021.0206

Citation:

WANG He, SHEN Jianhui, LIU Lusheng, YAN Guangyu, WU Yuhou, XIONG Jiaji, DANIEL Cristea. Wear properties of HFCVD diamond films on SiC substrate[J]. Diamond & Abrasives Engineering, 2022, 42(3): 283-289. doi: 10.13394/j.cnki.jgszz.2021.0206

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Wear properties of HFCVD diamond films on SiC substrate

doi: 10.13394/j.cnki.jgszz.2021.0206

WANG He^{1, 2
,},
SHEN Jianhui^{1, 2},
LIU Lusheng^{3
,
,},
YAN Guangyu^{1, 2},
WU Yuhou¹,
XIONG Jiaji³,
DANIEL Cristea⁴

1.
Joint International Research Laboratory of Modern Construction Engineering Equipment and Technology, Shenyang 110168, China
2.
College of Mechanical Engineering, Shenyang Jianzhu University, Shenyang 110168, China
3.
Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
4.
Materials Science and Engineering Faculty, Transilvania University of Brasov, Brasov 500036, Romania

More Information

Received Date: 2021-12-02
Accepted Date: 2022-03-14
Rev Recd Date: 2022-03-12

Available Online: 2022-07-13

Abstract

Abstract

Micro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and Raman spectrometer. The friction coefficient and the wear rate of diamond films were measured by friction experiments. The friction and wear properties of diamond films were studied by comparing the experimental results. The results show that the diamond-graphite composite film has better friction and wear properties, the surface roughness of which is 53.8 nm. The friction coefficient (0.040) is similar to that of the nano-diamond film (0.037), while the wear rate is the lowest, 2.07×10⁻⁷ mm³·N⁻¹·m⁻¹. Compared with those of SiC substrate, the wear rate (9.89×10⁻⁵ mm³·N⁻¹·m⁻¹) and the friction coefficient (0.580) of the diamond films have been greatly improved, which indicates that depositing diamond on the surface of SiC substrate significantly improves the performance of the silicon carbide in the field of friction.
- diamond film,
- silicon carbide,
- graphite,
- friction and wear,
- hot filament chemical vapor deposition

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References(18)

References

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