CN 41-1243/TG ISSN 1006-852X
Volume 42 Issue 4
Aug.  2022
Turn off MathJax
Article Contents
TIAN Ke, GUO Huiru, WU Yongbo, LU Zhengkai. Magnetic compound fluid polishing of aspheric workpiece under rotating magnetic field[J]. Diamond & Abrasives Engineering, 2022, 42(4): 495-503. doi: 10.13394/j.cnki.jgszz.2021.0211
Citation: TIAN Ke, GUO Huiru, WU Yongbo, LU Zhengkai. Magnetic compound fluid polishing of aspheric workpiece under rotating magnetic field[J]. Diamond & Abrasives Engineering, 2022, 42(4): 495-503. doi: 10.13394/j.cnki.jgszz.2021.0211

Magnetic compound fluid polishing of aspheric workpiece under rotating magnetic field

doi: 10.13394/j.cnki.jgszz.2021.0211
More Information
  • Received Date: 2021-12-23
  • Rev Recd Date: 2022-02-22
  • Available Online: 2023-02-07
  • According to the structural characteristics and the surface quality requirements of aspheric optical elements, a hemispherical head polishing head with radial magnetized permanent magnet as rotating magnetic field source is designed and manufactured on the basis of magnetic compound fluid (MCF) polishing. Firstly, through Ansoft Maxwell magnetic field simulation, the distributions of magnetic field around each magnet with different shapes, sizes and eccentricities are analyzed and compared, and the cylindrical magnet with diameter of 10.0 mm, height of 5.0 mm, eccentricity of 2.5 mm and radial magnetization is selected. Secondly, by observing and comparing the behaviors of MCF with different compositions, formula and supplies on the polishing head, the compositions of MCF polishing slurry is determined. Finally, the aspheric PMMA workpiece is polished with the prepared MCF polishing slurry and the self-made polishing head. After polishing for 15 min, the surface quality of the PMMA workpiece is significantly improved, its surface accuracy Rq is decreased from 0.703 μm to 2.433 nm, and the surface roughness Ra is reduced from 0.545 μm to 1.786 nm, indicating that the developed polishing head can realize the nano-polishing of aspheric workpiece.

     

  • loading
  • [1]
    张韬, 何建国, 黄文, 等. 机械轴与虚拟轴复合的磁流变抛光 [J]. 光学精密工程,2021,29(2):286-296. doi: 10.37188/OPE.20212902.0286

    ZHANG Tao, HE Jianguo, HUANG Wen, et al. Magnetorheological finishing method that combines mechanical and virtual axes [J]. Optics and Precision Engineering,2021,29(2):286-296. doi: 10.37188/OPE.20212902.0286
    [2]
    周涛, 张云飞, 樊炜, 等. 磁流变抛光回转对称非球面工件精确自定位 [J]. 光学精密工程,2020,28(3):610-620. doi: 10.3788/OPE.20202803.0610

    ZHOU Tao, ZHANG Yunfei, FAN Wei, et al. Precise localization of rotary symmetrical aspheric workpiece in magnetorheological polishing [J]. Optics and Precision Engineering,2020,28(3):610-620. doi: 10.3788/OPE.20202803.0610
    [3]
    龚峰, 李康森, 闫超. 玻璃精密模压成形的研究进展 [J]. 光学精密工程,2018,26(6):1380-1391. doi: 10.3788/OPE.20182606.1380

    GONG Feng, LI Kangsen, YAN Chao. Progress on precision glass molding [J]. Optics and Precision Engineering,2018,26(6):1380-1391. doi: 10.3788/OPE.20182606.1380
    [4]
    高金辉, 薛常喜, 龚峰. 光学玻璃非球面元件模压过程仿真与实验 [J]. 机械设计与制造,2019(2):195-198, 203. doi: 10.3969/j.issn.1001-3997.2019.02.049

    GAO Jinhui, XUE Changxi, GONG Feng. Simulation and experiment on molding process of optical glass aspheric components [J]. Machinery Design & Manufacture,2019(2):195-198, 203. doi: 10.3969/j.issn.1001-3997.2019.02.049
    [5]
    徐志强. 小口径非球面斜轴磁流变抛光关键技术研究 [D] . 长沙: 湖南大学, 2015.

    XU Zhiqiang. Study on key technology of inclined magnetorheological polishing for micro aspherical surface [D] . Changsha: Hunan University, 2015.
    [6]
    BEAUCAMP A, NAMBA Y, INASAKI I, et al. Finishing of optical moulds to λ/20 by automated corrective polishing [J]. CIRP Annals-Manufacturing Technology,2011,60(1):375-378. doi: 10.1016/j.cirp.2011.03.110
    [7]
    YAMAGATA Y, HIGUCHIT, HAMADA S, et al. Ultraprecision finishing of micro-aspheric surface by ultrasonic two-axis vibration assisted polishing [J]. CIRP Annals-Manufacturing Technology,2010,59(1):347-350. doi: 10.1016/j.cirp.2010.03.117
    [8]
    KORDONSKI W, SHOREY A. Magnetorheological (MR) jet finishing technology [J]. Journal of Intelligent Material Systems and Structures,2007,18(12):1127-1130. doi: 10.1177/1045389X07083139
    [9]
    王嘉琪, 肖强. 磁流变抛光技术的研究进展 [J]. 表面技术,2019,48(10):317-328.

    WANG Jiaqi, XIAO Qiang. Research progress of magnetorheological polishing technology [J]. Surface Technology,2019,48(10):317-328.
    [10]
    袁胜豪, 张云飞, 余家欣, 等. 磁流变抛光中表面彗尾状缺陷的生成与演变行为 [J]. 光学精密工程,2021,29(4):740-748. doi: 10.37188/OPE.2020.0499

    YUAN Shenghao, ZHANG Yunfei, YU Jiaxin, et al. Formation and evolution behavior of comet-tail defects in magnetorheological finishing [J]. Optics and Precision Engineering,2021,29(4):740-748. doi: 10.37188/OPE.2020.0499
    [11]
    SHIMADA K, TOYOHISA F, OKA H, et al. Hydrodynamic and magnetized characteristics of MCF (magnetic compound fluid) [J]. Transactions of the Japan Society of Mechanical Engineers B,2001,67(664):3034-3040. doi: 10.1299/kikaib.67.3034
    [12]
    陈家学. 单晶SiC等离子体辅助集群磁流变抛光加工研究 [D] . 广州: 广东工业大学, 2021.

    CHEN Jiaxue. Research on plasma-assisted cluster magnetorheological finishing of single crystal SiC wafer [D]. Guangzhou: Guangdong University of Technology, 2021.
    [13]
    GUO H R, WU Y B. Ultrafine polishing of optical polymer with zirconia-coated carbonyl-iron-particle-based magnetic compound fluid slurry [J]. The International Journal of Advanced Manufacturing Technology 2016, 85: 253-261.
    [14]
    唐恒宁, 尹韶辉, 陈逢军, 等. 磁流变斜轴抛光及其路径控制 [J]. 制造技术与机床,2009(11):32-35. doi: 10.3969/j.issn.1005-2402.2009.11.012

    TANG Hengning, YIN Shaohui, CHEN Fengjun, et al. Incined magnetorheological finishing and its path controlling [J]. Manufacturing Technology & Machine Tool,2009(11):32-35. doi: 10.3969/j.issn.1005-2402.2009.11.012
    [15]
    尹韶辉, 陈越, 王宇, 等. 磁流变抛光头形状对加工表面粗糙度的影响 [J]. 湖南大学学报(自然科学版),2010(1):45-48.

    YIN Shaohui, CHEN Yue, WANG Yu, et al. Influence of the shape of polishing tools on the surface roughness in magnetorheological finishing [J]. Journal of Hunan University (Natural Science Edition),2010(1):45-48.
    [16]
    FENG M, WU Y B, WANG Y L, et al. Investigation on the polishing of aspheric surfaces with a doughnut-shaped magnetic compound fluid (MCF) tool using an industrial robot [J]. Precision Engineering,2020,61:182-193. doi: 10.1016/j.precisioneng.2019.09.018
    [17]
    董国正. 小口径磁流变抛光装置设计与关键技术研究 [D] . 长沙: 国防科技大学, 2015.

    DONG Guozheng. Design of small-aperture magnetorheological finishing device and the key technology research [D] . Changsha: National University of Defense Technology, 2015.
    [18]
    FENG M, WU Y B, WANG Y L, et al. Effect of the components of magnetic compound fluid (MCF) slurry on polishing characteristics in aspheric-surface finishing with the doughnut-shaped MCF tool [J]. Precision Engineering,2020,65:216-229. doi: 10.1016/j.precisioneng.2020.04.021
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Figures(14)  / Tables(4)

    Article Metrics

    Article views (417) PDF downloads(37) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return