Compositions of slurry used in chemical-mechanically polishing 304 stainless steel

304 stainless steel will become one of the main materials of flexible display substrate due to its excellent characteristics. In order to improve the rate and quality of chemical mechanical polishing of 304 stainless steel, the influences of different oxidants on material removal rate and surface roughness under different mass concentration or volume concentration and pH value are mainly studied. The results show that the oxidants of Fe₂O₃, H₂O₂, and FeCl₃ achieved the best polishing effects in pH=2, and that KMnO₄ achieved the best polishing effect in pH=10. The best surface roughness is 4 nm when the volume concentration of H₂O₂ is 10 mL/L, and the highest material removal rate is 209 nm/min when the mass concentration of FeCl₃ is 4.0 g/L at their optimum pH.