Advances in studies and applications of thick diamond films prepared by microwave plasma chemical vapor deposition

LIU Fucheng; MA Guanjie; HUANG Jiangtao; ZHANG Zongyan; HAN Peigang; HE Bin

doi:10.13394/j.cnki.jgszz.2023.0270

Volume 45 Issue 3

Jun. 2025

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LIU Fucheng, MA Guanjie, HUANG Jiangtao, ZHANG Zongyan, HAN Peigang, HE Bin. Advances in studies and applications of thick diamond films prepared by microwave plasma chemical vapor deposition[J]. Diamond & Abrasives Engineering, 2025, 45(3): 285-299. doi: 10.13394/j.cnki.jgszz.2023.0270

Citation:

LIU Fucheng, MA Guanjie, HUANG Jiangtao, ZHANG Zongyan, HAN Peigang, HE Bin. Advances in studies and applications of thick diamond films prepared by microwave plasma chemical vapor deposition[J]. Diamond & Abrasives Engineering, 2025, 45(3): 285-299. doi: 10.13394/j.cnki.jgszz.2023.0270

Citation:

LIU Fucheng, MA Guanjie, HUANG Jiangtao, ZHANG Zongyan, HAN Peigang, HE Bin. Advances in studies and applications of thick diamond films prepared by microwave plasma chemical vapor deposition[J]. Diamond & Abrasives Engineering, 2025, 45(3): 285-299. doi: 10.13394/j.cnki.jgszz.2023.0270

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Advances in studies and applications of thick diamond films prepared by microwave plasma chemical vapor deposition

doi: 10.13394/j.cnki.jgszz.2023.0270

School of New Materials and New Energy, Shenzhen Technology University, Shenzhen 518118, Guangdong, China

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Received Date: 2023-12-13
Rev Recd Date: 2024-05-23

Abstract

Abstract

Significance With the wide range of important applications of diamond, the demand for large-area diamond has been increasing in recent years. Compared to other chemical vapor deposition (CVD) methods, the microwave plasma chemical vapor deposition (MPCVD) method is recognized as the best technology for depositing high-quality diamond films. To realize CVD diamond thick films for optical, electrical, and thermal applications, it is necessary to meet the requirements in terms of crystalline quality, optical transmittance, thermal conductivity, size, thickness, and strength. Therefore, obtaining diamond materials with sufficient size and quality is the foundation of their applications. Especially since this century, MPCVD equipment and processes have made breakthroughs, and the preparations of single crystal diamond and high-quality polycrystalline diamond thick films have been successfully realized. This paper introduces the principles and process of preparing diamond thick films by MPCVD, and summarizes the research and application progress of MPCVD-prepared diamond films at home and abroad in recent years. Our views on the future development of MPCVD-prepared diamond films are also proposed in this paper. Progress The MPCVD equipment originated overseas, initially developed by Japanese scientist Yoshihiko Kuriyama and researchers from Nippon Electric Company around the 1980s. Subsequently, countries such as Germany, Britain, the United States, and Russia also engaged in research and development efforts. The evolution of MPCVD chambers has seen a transition from quartz tubes and quartz bell jars to cylindrical resonance chambers, loop antennas, and ellipsoidal resonance chambers. Concurrently, power output has escalated from hundreds of watts to thousands and tens of kilowatts. The advancement of MPCVD technology was spearheaded by foreign entities like E6 (UK), Michigan State University (USA), and the Institute of Applied Physics (Russia), which gradually increased power levels and evolved cavity designs. With progress in diamond film deposition technology and ongoing exploration of microwave sources, higher-power 915 MHz MPCVD systems have been developed. The longer wavelength of 915 MHz microwaves enables these devices to achieve higher power levels, which facilitates an increase in the deposition rate and quality of diamond films, as well as the capability to produce larger-sized diamond films. Domestic development of MPCVD technology began relatively late, with institutions such as the University of Science and Technology Beijing, Hebei Province Laser Research Institute, and Xi'an University of Electronic Science and Technology developing 2.45 GHz and 915 MHz MPCVD equipment after the year 2000. Diamonds possess a high refractive index and significant dispersion, exhibiting superior thermal, mechanical, and optical properties. High-quality polycrystalline diamond films synthesized via the MPCVD method closely resemble natural type IIa diamonds in many aspects. Consequently, MPCVD-prepared diamond films have found extensive applications in optical window materials, thermal management, semiconductor devices, quantum technology, and optoelectronic devices. The third section of the paper provides a detailed account of the progress in applied research within these areas. Conclusions and Prospects Diamond is a material of significant interest and extensive research in the contemporary world. Over the decades, CVD diamond technology has matured, with preparation processes becoming well-established and the equipment continuously evolving and refining. Among the various CVD techniques, MPCVD equipment has seen particularly rapid development. Through persistent exploration, research, and development, the performance gap between domestically produced 2.45 GHz and 915 MHz MPCVD equipment in China and their foreign counterparts is narrowing, although there is still room for improvement in terms of power enhancement, equipment stability, and cavity design. MPCVD-method-prepared diamond thick films hold great promise for a variety of high-tech applications, including optics, thermal management, and electronics. However, their growth rate, size, and uniformity remain areas that require further attention. Looking ahead, ongoing research is essential in several key areas: optimizing and enhancing equipment, refining the growth process, and innovating process parameters (such as atmosphere, power, and substrate) to achieve higher growth rates, superior quality, and reduced costs. These efforts aim to meet the demands of commercialization, thereby facilitating the widespread adoption of diamond thick films in thermal deposition and optical applications.
- diamond thick films,
- microwave plasma chemical vapor deposition (MPCVD),
- CVD equipment

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References(96)

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