CN 41-1243/TG ISSN 1006-852X
XU Hao, SONG Enmin, BIAN Da, ZHAO Yongwu. Investigation of weak corrosion inhibitor for copper chemical mechanical polishing[J]. Diamond & Abrasives Engineering, 2021, 41(5): 32-39. doi: 10.13394/j.cnki.jgszz.2021.5.0006
Citation: XU Hao, SONG Enmin, BIAN Da, ZHAO Yongwu. Investigation of weak corrosion inhibitor for copper chemical mechanical polishing[J]. Diamond & Abrasives Engineering, 2021, 41(5): 32-39. doi: 10.13394/j.cnki.jgszz.2021.5.0006

Investigation of weak corrosion inhibitor for copper chemical mechanical polishing

doi: 10.13394/j.cnki.jgszz.2021.5.0006
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  • Rev Recd Date: 2021-04-25

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