Investigation of weak corrosion inhibitor for copper chemical mechanical polishing

This study uses electrochemical, contact angle, chemical mechanical polishing and other experiments to study the effect of a new environmentally friendly potential copper corrosion inhibitor polyvinyl pyrrolidone(PVP). Experiment results show that PVP has a multi-purpose effect in copper chemical mechanical polishing. That mixing it with another environmentally friendly weak corrosion inhibitor TAZ ensures the flattening effect and environmental protection properties, and can achieve large removal of low pressure in industrial production. When the roughness is 2.28 nm, the removal rate can reach to 1 291 nm/min.