CN 41-1243/TG ISSN 1006-852X
Volume 42 Issue 2
May  2022
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LU Jiabin, CAO Jiyang, DENG Jiayun, YAN Qiusheng, HU Da. Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC[J]. Diamond & Abrasives Engineering, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008
Citation: LU Jiabin, CAO Jiyang, DENG Jiayun, YAN Qiusheng, HU Da. Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC[J]. Diamond & Abrasives Engineering, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008

Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC

doi: 10.13394/j.cnki.jgszz.2022.0008
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  • Received Date: 2022-02-14
  • Accepted Date: 2022-04-11
  • Rev Recd Date: 2022-02-28
  • To improve the lapping quality and processing efficiency of single-crystal SiC, solid-state Fenton reaction lapping pellets were prepared. Effects of characteristics of Fe3O4 (particle size and mass fraction) solid-phase catalyst on hardness, flexural strength, porosity, catalytic performance, and lapping performance of single-crystal SiC were studied. The results show that with the increase of Fe3O4 particle size, the hardness and flexural strength decrease, porosity increases, catalytic performance decreases, the material removal rate MMRR decreases from 43.12 nm/min to 36.82 nm/min, and the surface roughness Ra increases from 1.06 nm to 3.72 nm. As the Fe3O4 mass fraction increases, the hardness and flexural strength of the lapping pellets decrease, and the porosity and catalytic performance increase. The MMRR decreases from 40.14 nm/min to 33.51 nm/min, the surface roughness Ra is 3.25 nm, 1.75 nm and 1.88 nm, respectively.

     

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