Citation: | LIANG Huazhuo, FU Youzhi, HE Junfeng, XU Lanying, YAN Qiusheng. Magnetorheological chemical compound polishing of single crystal SiC substrate[J]. Diamond & Abrasives Engineering, 2022, 42(1): 129-135. doi: 10.13394/j.cnki.jgszz.2021.0108 |
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