Simulation experimental on material removal mechanism of ITO conductive glass by single abrasive

QIU Xiaolong; SUN Xingwei; LIU Yin; YANG Heran; DONG Zhixu; ZHANG Weifeng

doi:10.13394/j.cnki.jgszz.2023.0183

Volume 44 Issue 3

Jun. 2024

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Article Navigation > Diamond & Abrasives Engineering > 2024 > 44(3): 354-362

QIU Xiaolong, SUN Xingwei, LIU Yin, YANG Heran, DONG Zhixu, ZHANG Weifeng. Simulation experimental on material removal mechanism of ITO conductive glass by single abrasive[J]. Diamond & Abrasives Engineering, 2024, 44(3): 354-362. doi: 10.13394/j.cnki.jgszz.2023.0183

Citation:

QIU Xiaolong, SUN Xingwei, LIU Yin, YANG Heran, DONG Zhixu, ZHANG Weifeng. Simulation experimental on material removal mechanism of ITO conductive glass by single abrasive[J]. Diamond & Abrasives Engineering, 2024, 44(3): 354-362. doi: 10.13394/j.cnki.jgszz.2023.0183

Citation:

QIU Xiaolong, SUN Xingwei, LIU Yin, YANG Heran, DONG Zhixu, ZHANG Weifeng. Simulation experimental on material removal mechanism of ITO conductive glass by single abrasive[J]. Diamond & Abrasives Engineering, 2024, 44(3): 354-362. doi: 10.13394/j.cnki.jgszz.2023.0183

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Simulation experimental on material removal mechanism of ITO conductive glass by single abrasive

doi: 10.13394/j.cnki.jgszz.2023.0183

QIU Xiaolong¹,
SUN Xingwei^{1, 2, 3
,},
LIU Yin^{1, 2, 3},
YANG Heran^{1, 2, 3},
DONG Zhixu^{1, 2, 3},
ZHANG Weifeng^{1, 2, 3}

1.
School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, China
2.
Liaoning Province Key Laboratory of Complex Surface NC Manufacturing Technology, Shenyang 110870, China
3.
Liaoning Province University Complex Surface CNC Manufacturing Equipment Laboratory, Shenyang 110870, China

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Received Date: 2023-09-01
Accepted Date: 2023-11-03
Rev Recd Date: 2023-10-08

Available Online: 2023-11-06

Abstract

Abstract

To study the removal mechanism of ITO conductive glass materials, this paper uses a single abrasive particle to simulate the cutting process of the materials and establishes a material model for ITO glass. Based on the analysis of processed surface morphology, stress, and cutting force, the material removal mechanism of ITO glass is examined. Additionally, the influence of cutting parameters on cutting force and residual stress is studied and compared with soda-lime glass. The results show that during the cutting process of abrasive particle, material removal is influenced by the ITO film layer, the glass substrate, and cohesive contact behavior, leading to failure forms such as delamination, channel cracking, and interlayer fracture. With the feed of the abrasive particle, the cutting force fluctuates within a certain range, exhibiting a pattern of growth, stability, and decrease. The cutting force of the abrasive particle is positively correlated with both cutting speed and cutting depth. Compared to the glass substrate, the residual stress on the ITO film is larger and fluctuates more dramatically. The presence of the ITO film significantly influences cutting behavior, especially when the cutting depth approaches the thickness of the ITO film.
- ITO conductive glass,
- material removal mechanism,
- cutting force,
- residual stress

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References

[1]	THIRUMOORTHI M, PRAKASH J T J. Structure, optical and electrical properties of indium tin oxide ultra thin films prepared by jet nebulizer spray pyrolysis technique [J]. Journal of Asian Ceramic Societies,2016,4(1):124-132. doi: 10.1016/j.jascer.2016.01.001
[2]	LEWIS B G, PAINE D C. Applications and processing of transparent conducting oxides [J]. Mrs Bulletin,2000,25(8):22-27. doi: 10.1557/mrs2000.147
[3]	HENGST C, MENZEL S B, RANE G K, et al. Mechanical properties of ZTO, ITO, and a-Si: H multilayer films for flexible thin film solar cells [J]. Materials,2017,10(3):245. doi: 10.3390/ma10030245
[4]	OH S J, KWON J H, LEE S, et al. Unveiling the annealing-dependent mechanical properties of freestanding indium tin oxide thin films [J]. Acs Applied Materials & Interfaces,2021,13(14):16650-16659.
[5]	WANG Z X, WANG S B, WANG J R, et al. Mechanical performance of ITO/Ag/ITO multilayer films deposited on glass substrate by RF and DC magnetron sputtering [J]. Ceramics International,2021,47(22):31442-31450. doi: 10.1016/j.ceramint.2021.08.020
[6]	JUNG H S, EUN K, KIM Y T, et al. Experimental and numerical investigation of flexibility of ITO electrode for application in flexible electronic devices [J]. Microsystem Technologies,2017,23(6):1961-1970.
[7]	ZIAEI S, WU Q, FITCH J, et al. Channel cracking and interfacial delamination of indium tin oxide (ITO) nano-sized films on polyethylene terephthalate (PET) substrates: experiments and modeling [J]. Experimental Mechanics,2019,59(5):703-712. doi: 10.1007/s11340-019-00534-y
[8]	TIAN X, XIONG S, ZHANG Y, et al. Simulation of thermal stress in ion beam sputtered Ta₂O₅/SiO₂ multilayer coatings on different substrates by finite element analysis [J]. Surface and Coatings Technology,2019(362):225-233.
[9]	QIU Y, JIN Y, ZHAO H, et al. Physical properties of ITO thin films prepared by ion-assisted electron beam evaporation[C]// International Symposium on Optoelectronic Technology and Application, 2014(9295): 929505.
[10]	LEE K Y, CHOI G W, KIM Y J, et al. Chemical mechanical polishing characteristics of ITO thin film prepared by RF magnetron sputtering [J]. Journal of the Korean Physical Society,2012,60(3):388-392. doi: 10.3938/jkps.60.388
[11]	CHEN L, CAO K Q, LIU J K, et al. Surface birefringence of regular periodic surface structures produced on glass coated with an indium tin oxide film using a low-fluence femtosecond laser through a cylindrical lens [J]. Optics Express,2020,28(20):30094-30106. doi: 10.1364/OE.402037
[12]	TAN S, LONG S, YAO X, et al. An improved material model for loading-path and strain-rate dependent strength of impacted soda-lime glass plate [J]. Journal of Materials Research and Technology,2021(15):1905-1919.
[13]	CHEN J, BULL S J. Assessment of the toughness of thin coatings using nanoindentation under displacement control [J]. Thin Solid Films,2006,494(1/2):1-7.
[14]	HARPER P W, HALLETT S R. Cohesive zone length in numerical simulations of composite delamination [J]. Engineering Fracture Mechanics,2008,75(16):4774-4792. doi: 10.1016/j.engfracmech.2008.06.004
[15]	黄水泉, 高尚, 黄传真, 等. 脆性材料磨粒加工的纳米尺度去除机理 [J]. 金刚石与磨料磨具工程,2022,42(3):257-267,384. HUANG Shuiquan, GAO Shang, HUANG Chuanzhen, et al. Nanoscale removal mechanisms in abrasive machining of brittle solids [J]. Diamond & Abrasives Engineering,2022,42(3):257-267,384.
[16]	葛培琪, 陈自彬, 王沛志. 单晶硅切片加工技术研究进展 [J]. 金刚石与磨料磨具工程,2020,40(4):12-18. GE Peiqi, CHEN Zibin, WANG Peizhi. Review of monocrystalline silicon slicing technology [J]. Diamond & Abrasives Engineering,2020,40(4):12-18.
[17]	WAN L, LI L, DENG Z, et al. Thermal-mechanical coupling simulation and experimental research on the grinding of zirconia ceramics [J]. Journal of Manufacturing Processes,2019(47):41-51.
[18]	HSU J S, LEE C C, WEN B J, et al. Experimental and simulated investigations of thin polymer substrates with an indium tin oxide coating under fatigue bending loadings [J]. Materials,2016,9(9):720. doi: 10.3390/ma9090720

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Simulation experimental on material removal mechanism of ITO conductive glass by single abrasive

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Simulation experimental on material removal mechanism of ITO conductive glass by single abrasive

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